Malvern Panalytical – XRF – X’Pert³ Materials Research Diffractometers (MRD)
The new generation of versatile materials research diffraction systems
The long and successful history of PANalytical’s Materials Research Diffractometers (MRD) continues with a new generation – X’Pert³ MRD and X’Pert³ MRD XL. The improved performance and reliability of the new platform have added more analytical capability and power for X-ray scattering studies in:
- advanced materials science
- scientific and industrial thin film technology
- metrological characterization in semiconductor process development
Both systems handle the same wide range of applications with full wafer mapping up to 100 mm (X’Pert³ MRD) or 200 mm (X’Pert³ MRD XL).
DKSH is the exclusive distributor in Cambodia, Laos, Malaysia, Myanmar, Philippines, Thailand and Vietnam.
Technical Specifications
Goniometer- Step Size | Minimum step size 0.0001˚ |
Goniometer- Radius | Radius: X’Pert³ MRD 320 mm (horizontal); Radius: X’Pert³ MRD XL 420 mm (horizontal) |
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Open Eulerian Cradle- Chi Rotation | +/- 92˚ |
Open Eulerian Cradle- Phi Rotation | 2 x 360˚ |
Open Eulerian Cradle- x,y translation | 100 x 100 mm (X’Pert³ MRD); 200 x 200 mm (X’Pert³ MRD XL) |
Open Eulerian Cradle- z translation | minimum step size 1 µm |
C-to-C Wafer Loaders- Size | 2” to 150 mm; 100 to 300 mm |
Available Models
Key Features
- Wafer mapping up to 200 mm meets all the high-resolution XRD analysis requirements.
- High-resolution analysis capability is improved by the outstanding accuracy of a new high-resolution goniometer using Heidenhain encoders.
- Provides the longest liftetime of incident beam components (CRISP) and maximum uptime with pneumatic shutters and beam attenuators.
- With the 2nd generation PreFIX mounting platform, reconfiguring is easy within minutes and optics positioning is more accurate than ever.
- Allows for the measurement of diffraction from lattice planes that are perpendicular to the sample surface.
- Possible standard and in-plane geometries on one system and a wide range of diffraction experiments on polycrystalline and highly perfect thin films.
Key Industries
- Die & Mould
- Electronics
- Powders & Pigments / Coating
- Semiconductor, Solar & Electronics
Brand
Malvern Panalytical was formed by the merger of Malvern Instruments Limited and PANalytical B.V. on 1st January 2017, has headquarters in both Almelo (the Netherlands), and in Malvern (UK), and employs over 2,000 people worldwide. The combined entity is a strong player and innovator in the materials characterization market and will leverage the strengths of the individual companies in their end markets, ranging from building materials to pharmaceuticals and from metals and mining to nanomaterials.
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